From balaji at snf.stanford.edu Mon Jul 9 05:21:12 2001 From: balaji at snf.stanford.edu (balaji at snf.stanford.edu) Date: Jul 9, 2001 5:21:12 PM Subject: Problem svgcoat 2001-07-09 17:21:10: non-uniform acceleration Message-ID: +-4% variation while spinning. Suspect non-uniform acceleration, resulting in non-uniform coating. From balaji at snf.stanford.edu Mon Jul 9 05:21:31 2001 From: balaji at snf.stanford.edu (balaji at snf.stanford.edu) Date: Jul 9, 2001 5:21:31 PM Subject: Problem svgcoat 2001-07-09 17:21:21: Message-ID: From vilanova at snf.stanford.edu Wed Jul 11 08:42:42 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 11, 2001 8:42:42 AM Subject: Problem svgcoat 2001-07-09 17:21:21: Message-ID: Ran a couple of wafers, Working ok , NO problem found From vilanova at snf.stanford.edu Wed Jul 11 08:44:50 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 11, 2001 8:44:50 AM Subject: Problem svgcoat 2001-07-09 17:21:10: non-uniform acceleration Message-ID: Ran a couple of wafers ,tested it , working ok From balaji at snf.stanford.edu Thu Jul 12 09:47:48 2001 From: balaji at snf.stanford.edu (balaji at snf.stanford.edu) Date: Jul 12, 2001 9:47:48 AM Subject: Problem svgcoat 2001-07-12 09:47:46: inconsistent spin speed Message-ID: Spin coater accelerates too fast while starting - speed variation maxing out. From martinez at snf.stanford.edu Thu Jul 12 11:02:50 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jul 12, 2001 11:02:50 AM Subject: Shutdown svgcoat 2001-07-12 11:02:50: coater shutdown Message-ID: high spin speed deviation problem From martinez at snf.stanford.edu Thu Jul 12 05:31:50 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jul 12, 2001 5:31:50 PM Subject: Shutdown svgcoat 2001-07-12 11:02:50: coater shutdown Message-ID: replaced high speed motor and spindle ass'y. calibrated spindle to 9.7krpm. cycled test wafers. ready for use. From martinez at snf.stanford.edu Thu Jul 12 05:32:03 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jul 12, 2001 5:32:03 PM Subject: Problem svgcoat 2001-07-12 09:47:46: inconsistent spin speed Message-ID: ok now From dton at snf.stanford.edu Thu Jul 12 08:40:35 2001 From: dton at snf.stanford.edu (dton at snf.stanford.edu) Date: Jul 12, 2001 8:40:35 PM Subject: Problem svgcoat 2001-07-12 20:40:33: Resist Dispenser does not work correctly Message-ID: The Dispenser for 3612 did manage to cover the resist all over the wafer. It left the center un-coated. From martinez at snf.stanford.edu Thu Jul 12 10:28:41 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jul 12, 2001 10:28:41 PM Subject: Problem svgcoat 2001-07-12 20:40:33: Resist Dispenser does not work correctly Message-ID: cycled some test wafers but before I did that, I CLEANED THE NOZZLE. resist uniformity looked good. no problem found. ready for use. From davehong at snf.stanford.edu Tue Jul 24 04:46:30 2001 From: davehong at snf.stanford.edu (davehong at snf.stanford.edu) Date: Jul 24, 2001 4:46:30 PM Subject: Problem svgcoat 2001-07-24 16:46:26: wafer transport problem Message-ID: After resist has been spun on the wafer, the wafer does not move to the next stage (bake stage). The rotation belt is still running but the wafer is not making contact to the belt so it remained on top of vacuum chuck. From martinez at snf.stanford.edu Tue Jul 24 06:37:56 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jul 24, 2001 6:37:56 PM Subject: Problem svgcoat 2001-07-24 16:46:26: wafer transport problem Message-ID: cycled test wafers and could not duplicate the problem. ready for use From martinez at snf.stanford.edu Wed Jul 25 12:04:53 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jul 25, 2001 12:04:53 PM Subject: Shutdown svgcoat 2001-07-25 12:04:51: shutdown hmds module Message-ID: lifting From martinez at snf.stanford.edu Wed Jul 25 06:08:59 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jul 25, 2001 6:08:59 PM Subject: Shutdown svgcoat 2001-07-25 12:04:51: shutdown hmds module Message-ID: coater module available for use. vapor prime is still down. From martinez at snf.stanford.edu Wed Jul 25 06:09:45 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jul 25, 2001 6:09:45 PM Subject: Problem svgcoat 2001-07-25 18:09:42: hmds down Message-ID: coater available for use . primer is still not working. From martinez at snf.stanford.edu Wed Jul 25 09:18:03 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jul 25, 2001 9:18:03 PM Subject: Problem svgcoat 2001-07-25 18:09:42: hmds down Message-ID: replaced hmds and hmds feed line, purged hmds lines, cleaned bowl, hot plate, & lid. cycled Si, SiO2, & Al test wafers with resist thickness of 1.0 & 1.6u. image patterns on all wafers were intact after develop. ready for use. From dton at snf.stanford.edu Sat Jul 28 01:17:36 2001 From: dton at snf.stanford.edu (dton at snf.stanford.edu) Date: Jul 28, 2001 1:17:36 PM Subject: Problem svgcoat 2001-07-28 13:17:34: Bead removal doesn't work well Message-ID: Tried with SPR 220-7 resist. The bead removal part of the program doesnt seem to clear the bead off the wafer. Look like the acetone arm doesn't move during the washing cycle. Regards, DT From vilanova at snf.stanford.edu Mon Jul 30 08:50:27 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jul 30, 2001 8:50:27 AM Subject: Problem svgcoat 2001-07-28 13:17:34: Bead removal doesn't work well Message-ID: EC-13 Solvent Added to canister, tested i tworking ok, ready to use