Shutdown svgcoat 2001-07-12 11:02:50: coater shutdown
martinez at snf.stanford.edu
martinez at snf.stanford.edu
Thu Jul 12 11:02:50 PDT 2001
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Problem svgcoat 2001-07-12 09:47:46: inconsistent spin speed
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Shutdown svgcoat 2001-07-12 11:02:50: coater shutdown
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high spin speed deviation problem
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Problem svgcoat 2001-07-12 09:47:46: inconsistent spin speed
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Shutdown svgcoat 2001-07-12 11:02:50: coater shutdown
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