Problem svgcoat 2001-07-12 20:40:33: Resist Dispenser does not work correctly

dton at snf.stanford.edu dton at snf.stanford.edu
Thu Jul 12 08:40:35 PDT 2001


The Dispenser for 3612 did manage to cover the resist
all over the wafer.  It left the center un-coated.




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