Problem svgcoat 2001-07-12 20:40:33: Resist Dispenser does not work correctly
martinez at snf.stanford.edu
martinez at snf.stanford.edu
Thu Jul 12 10:28:41 PDT 2001
cycled some test wafers but before I did that, I
CLEANED THE NOZZLE. resist uniformity looked good.
no problem found. ready for use.
More information about the svgcoat-pcs
mailing list