Problem svgcoat 2001-07-12 20:40:33: Resist Dispenser does not work correctly

martinez at snf.stanford.edu martinez at snf.stanford.edu
Thu Jul 12 10:28:41 PDT 2001


cycled some test wafers but before I did that,  I
CLEANED THE NOZZLE. resist uniformity looked good.
no problem found. ready for use.




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