Problem svgcoat 2001-07-24 16:46:26: wafer transport problem

davehong at snf.stanford.edu davehong at snf.stanford.edu
Tue Jul 24 04:46:30 PDT 2001


After resist has been spun on the wafer, the wafer does not move to the next stage (bake stage).  The rotation belt is still running but the wafer is not making contact to the belt so it remained on top of vacuum chuck.




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