Problem svgcoat 2001-07-25 18:09:42: hmds down

martinez at snf.stanford.edu martinez at snf.stanford.edu
Wed Jul 25 09:18:03 PDT 2001


replaced hmds and hmds feed line, purged hmds lines, 
cleaned bowl, hot plate, & lid. cycled Si, SiO2, & Al test
wafers with resist thickness of 1.0 & 1.6u. image patterns
on all wafers were intact after develop.  ready for use.




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