Problem svgcoat 2001-07-25 18:09:42: hmds down

[martinez at snf.stanford.edu]

replaced hmds and hmds feed line, purged hmds lines, 
cleaned bowl, hot plate, & lid. cycled Si, SiO2, & Al test
wafers with resist thickness of 1.0 & 1.6u. image patterns
on all wafers were intact after develop.  ready for use.