Problem svgcoat 2001-07-28 13:17:34: Bead removal doesn't work well

dton at snf.stanford.edu dton at snf.stanford.edu
Sat Jul 28 01:17:36 PDT 2001


Tried with SPR 220-7 resist.  The bead removal
part of the program doesnt seem to clear the bead off
the wafer.  Look like the acetone arm doesn't move during
the washing cycle.
Regards,
DT




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