From aaronp at snf.stanford.edu Sun Jun 3 11:42:45 2001 From: aaronp at snf.stanford.edu (aaronp at snf.stanford.edu) Date: Jun 3, 2001 11:42:45 AM Subject: Problem svgcoat 2001-06-03 11:42:43: HMDS hot plate out Message-ID: From mahnaz at snf.stanford.edu Tue Jun 5 10:11:04 2001 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Jun 5, 2001 10:11:04 AM Subject: Shutdown svgcoat 2001-06-05 10:11:03: track is not usable Message-ID: unfortunatly the system has not been put back to gether, so my comment to some of you regarding to use the spin and pre bake is not correct. From martinez at snf.stanford.edu Tue Jun 5 10:29:07 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jun 5, 2001 10:29:07 PM Subject: Shutdown svgcoat 2001-06-05 10:11:03: track is not usable Message-ID: coater module is available for manual operation only. vapor prime module is non functional. From vilanova at snf.stanford.edu Wed Jun 6 02:50:59 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jun 6, 2001 2:50:59 PM Subject: Shutdown svgcoat 2001-06-06 14:50:59: Message-ID: SVG Eng. Wiil bring parts tomorrow 6/7/01 From mahnaz at snf.stanford.edu Wed Jun 6 03:36:54 2001 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Jun 6, 2001 3:36:54 PM Subject: Shutdown svgcoat 2001-06-06 14:50:59: run the system in Manuall Message-ID: no HMDS, only resist and soft bake. From vilanova at snf.stanford.edu Thu Jun 7 09:28:26 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jun 7, 2001 9:28:26 AM Subject: Problem svgcoat 2001-06-03 11:42:43: HMDS hot plate Ready to use Message-ID: Replaced solenoid, power cable, Fuse. Tested , Ready to Use From aaronp at snf.stanford.edu Wed Jun 13 04:23:25 2001 From: aaronp at snf.stanford.edu (aaronp at snf.stanford.edu) Date: Jun 13, 2001 4:23:25 PM Subject: Problem svgcoat 2001-06-13 16:23:22: no EBR Message-ID: From vilanova at snf.stanford.edu Thu Jun 14 07:01:21 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jun 14, 2001 7:01:21 AM Subject: Problem svgcoat 2001-06-13 16:23:22: EBR Added to Canister Message-ID: EBR Added To Canister, Ready to use From lindaw at snf.stanford.edu Mon Jun 25 09:41:15 2001 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Jun 25, 2001 9:41:15 AM Subject: Problem svgcoat 2001-06-25 09:41:14: fsa optical signal to video is having big problems Message-ID: when in frontside alignment mode, the signal from the objectives to the video is extremely noisy. Video was fine using BSA optics. When I switched back to front side, the signal to the display was normal for a few seconds, then went noisy again. Frontside alignment is impossible under these conditions. From lindaw at snf.stanford.edu Mon Jun 25 10:03:49 2001 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Jun 25, 2001 10:03:49 AM Subject: Comment svgcoat 2001-06-25 10:03:48: OOPS! Last message for Karlsuss, not svgcoat Message-ID: It's Monday, what can I say. Sorry. From vilanova at snf.stanford.edu Mon Jun 25 10:05:00 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jun 25, 2001 10:05:00 AM Subject: Problem svgcoat 2001-06-25 09:41:14: fsa optical signal to video is having big problems Message-ID: the problem is the Karlsuss and not the Coater. Ok to u se