From ctull at snf.stanford.edu Sun Mar 18 10:11:30 2001 From: ctull at snf.stanford.edu (ctull at snf.stanford.edu) Date: Mar 18, 2001 10:11:30 AM Subject: Problem svgcoat 2001-03-18 10:11:30: svgcoat problem Message-ID: wafers do not stop on the cooling plate after the hot plate bake (coat prog 7,bake prog 1) From martinez at snf.stanford.edu Mon Mar 19 11:14:07 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mar 19, 2001 11:14:07 AM Subject: Problem svgcoat 2001-03-18 10:11:30: svgcoat problem Message-ID: cycled wafers, no problem found. From lindaw at snf.stanford.edu Wed Mar 21 09:04:09 2001 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mar 21, 2001 9:04:09 AM Subject: Problem svgcoat 2001-03-21 09:04:08: spinner won't spin or even take wafers Message-ID: the belt track is open wide and will not accept wafers from vapor prime. tried turning off and back on, to no avail. From vilanova at snf.stanford.edu Wed Mar 21 09:19:33 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mar 21, 2001 9:19:33 AM Subject: Problem svgcoat 2001-03-21 09:04:08: Svg Coater Tested Working Ok, Ready for use Message-ID: Testes Working ok, Ready for use From mahnaz at snf.stanford.edu Tue Mar 27 11:15:44 2001 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mar 27, 2001 11:15:44 AM Subject: Problem svgcoat 2001-03-27 11:15:42: Message-ID: From mahnaz at snf.stanford.edu Tue Mar 27 11:16:24 2001 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mar 27, 2001 11:16:24 AM Subject: Problem svgcoat 2001-03-27 11:15:42: Message-ID: sorry