From jhemanth at snf.stanford.edu  Fri May 11 09:13:32 2001
From: jhemanth at snf.stanford.edu (jhemanth at snf.stanford.edu)
Date: May 11, 2001 9:13:32 PM
Subject: Problem svgcoat 2001-05-11 21:13:32: The trqacks after the prime in coater are not moving
Message-ID: <mailman.172.1357938698.25882.svgcoat-pcs@snf.stanford.edu>

Hi Mahnaz,
I wanted to coat 1.6 u resist and found that the wafers would not move on to the coater as the tracks refused to rotate. I am not sure if this problem is a common one so I am reporting it to you
Thanks
Hemanth



From suzanne at snf.stanford.edu  Mon May 14 09:28:44 2001
From: suzanne at snf.stanford.edu (suzanne at snf.stanford.edu)
Date: May 14, 2001 9:28:44 AM
Subject: Shutdown svgcoat 2001-05-14 09:28:43: spin section dead
Message-ID: <mailman.173.1357938698.25882.svgcoat-pcs@snf.stanford.edu>




From martinez at snf.stanford.edu  Mon May 14 11:50:10 2001
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: May 14, 2001 11:50:10 AM
Subject: Shutdown svgcoat 2001-05-14 09:28:43: spin section dead
Message-ID: <mailman.174.1357938698.25882.svgcoat-pcs@snf.stanford.edu>

spin section revived. 



From martinez at snf.stanford.edu  Mon May 14 11:51:03 2001
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: May 14, 2001 11:51:03 AM
Subject: Problem svgcoat 2001-05-11 21:13:32: The trqacks after the prime in coater are not moving
Message-ID: <mailman.175.1357938698.25882.svgcoat-pcs@snf.stanford.edu>

replaced broken wire at 24v power supply. cycled wafers
ready for use