Problem svgcoat 2001-05-11 21:13:32: The trqacks after the prime in coater are not moving

[jhemanth at snf.stanford.edu]

Hi Mahnaz,
I wanted to coat 1.6 u resist and found that the wafers would not move on to the coater as the tracks refused to rotate. I am not sure if this problem is a common one so I am reporting it to you
Thanks
Hemanth