Problem svgcoat 2001-05-11 21:13:32: The trqacks after the prime in coater are not moving

jhemanth at snf.stanford.edu jhemanth at snf.stanford.edu
Fri May 11 09:13:32 PDT 2001


Hi Mahnaz,
I wanted to coat 1.6 u resist and found that the wafers would not move on to the coater as the tracks refused to rotate. I am not sure if this problem is a common one so I am reporting it to you
Thanks
Hemanth




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