Problem svgcoat 2001-05-11 21:13:32: The trqacks after the prime in coater are not moving
martinez at snf.stanford.edu
martinez at snf.stanford.edu
Mon May 14 11:51:03 PDT 2001
replaced broken wire at 24v power supply. cycled wafers
ready for use
More information about the svgcoat-pcs
mailing list