From vilanova at snf.stanford.edu  Thu Nov  1 07:50:53 2001
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Nov 1, 2001 7:50:53 AM
Subject: Problem svgcoat 2001-10-31 21:56:13: prebake oven down
Message-ID: <mailman.285.1357938699.25882.svgcoat-pcs@snf.stanford.edu>

Hotplate found Full of photoresist, Cleaned hotplate, tested it
Working Ok , ready to use.



From true at snf.stanford.edu  Tue Nov 13 04:53:44 2001
From: true at snf.stanford.edu (true at snf.stanford.edu)
Date: Nov 13, 2001 4:53:44 PM
Subject: Problem svgcoat 2001-11-13 16:53:43: prime locking arm loose
Message-ID: <mailman.286.1357938699.25882.svgcoat-pcs@snf.stanford.edu>

the small metal arm that locks the lid of the prime station is loose and starts to come undone after a few wafers. It needs to be tighted. I saw a wafer break last week, I think because of this problem.



From martinez at snf.stanford.edu  Wed Nov 14 07:31:34 2001
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Nov 14, 2001 7:31:34 AM
Subject: Problem svgcoat 2001-11-13 16:53:43: prime locking arm loose
Message-ID: <mailman.287.1357938699.25882.svgcoat-pcs@snf.stanford.edu>

adj arm lock tension



From pzwahlen at snf.stanford.edu  Wed Nov 14 08:58:50 2001
From: pzwahlen at snf.stanford.edu (pzwahlen at snf.stanford.edu)
Date: Nov 14, 2001 8:58:50 PM
Subject: Problem svgcoat 2001-11-14 20:58:49: EBR running low
Message-ID: <mailman.288.1357938699.25882.svgcoat-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Thu Nov 15 07:30:35 2001
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Nov 15, 2001 7:30:35 AM
Subject: Problem svgcoat 2001-11-14 20:58:49: EBR running low
Message-ID: <mailman.289.1357938699.25882.svgcoat-pcs@snf.stanford.edu>

EBR Added To Canister, Cycled Wafers , working ok
Ready to use.