Problem svgcoat 2001-11-13 16:53:43: prime locking arm loose

true at snf.stanford.edu true at snf.stanford.edu
Tue Nov 13 04:53:44 PST 2001


the small metal arm that locks the lid of the prime station is loose and starts to come undone after a few wafers. It needs to be tighted. I saw a wafer break last week, I think because of this problem.




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