From vilanova at snf.stanford.edu Mon Oct 1 09:33:02 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 1, 2001 9:33:02 AM Subject: Shutdown svgcoat 2001-10-01 09:33:02: Top EBR Message-ID: The UTS Techs Are here to Add the Top EBR . This Will take a few Hours. From martinez at snf.stanford.edu Mon Oct 1 09:00:02 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 1, 2001 9:00:02 PM Subject: Shutdown svgcoat 2001-10-01 09:33:02: Top EBR Message-ID: programs #7 & #8 are available for use. prog#4 needs additional tweaking. we will reserve the coater on 10/2/01 14:00hrs From mahnaz at snf.stanford.edu Wed Oct 3 11:36:07 2001 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Oct 3, 2001 11:36:07 AM Subject: Problem svgcoat 2001-10-03 11:36:06: EBR acting up Message-ID: Ebr is back splashing and we adjusted as much as we could. called the vendor and suggest to use the program# 2 and only change the rpm. Do not power cycle or change the program at all. From mahnaz at snf.stanford.edu Wed Oct 3 06:07:58 2001 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Oct 3, 2001 6:07:58 PM Subject: Problem svgcoat 2001-10-03 18:07:56: Prime oven broke awfaer and Message-ID: Please do not use the Prime oven is totally out of adjustment. From vilanova at snf.stanford.edu Mon Oct 8 11:09:41 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 8, 2001 11:09:41 AM Subject: Problem svgcoat 2001-10-03 11:36:06: EBR acting up Message-ID: Replaced CPU board and Nozzles. Top and Bottom EBR Working ok Ready to use From vilanova at snf.stanford.edu Mon Oct 8 11:10:28 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 8, 2001 11:10:28 AM Subject: Problem svgcoat 2001-10-03 18:07:56: Prime oven broke awfaer and Message-ID: Replaced CPU board, Nozzles Top And Bottom EBR working Ok Ready to use From beckwith at snf.stanford.edu Mon Oct 8 05:24:49 2001 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Oct 8, 2001 5:24:49 PM Subject: Problem svgcoat 2001-10-08 17:24:48: severe backsplashing on prog. 8 Message-ID: which seems to disappear if the ebr tank pressure is released*...suggestion: put a pressure regulator on the tank then I (and others) won't have to keep stripping wafers over and over again. *I was "helped" by another lab user, when the pressure was released just prior to the ebr step there was no back splash, this is good for only two wafers and has to be done again! I still have to strip one wafer (for the second time today). From vilanova at snf.stanford.edu Tue Oct 9 02:24:16 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 9, 2001 2:24:16 PM Subject: Problem svgcoat 2001-10-08 17:24:48: severe backsplashing on prog. 8 Message-ID: Programs # 8 has been fixed program # 4 has been fixed ,automatic pre dispense Always run a Dummy wafer and please do not change or touch anything. Ok to use From tkramer at snf.stanford.edu Tue Oct 9 08:05:44 2001 From: tkramer at snf.stanford.edu (tkramer at snf.stanford.edu) Date: Oct 9, 2001 8:05:44 PM Subject: Problem svgcoat 2001-10-09 20:05:43: kink in 3612 line Message-ID: There appears to be a kink in the 3612 line, possibly leading to air bubbles. It is about an inch from the dispense end of the line. I didn't observe any problem with my wafers. From mbartsch at snf.stanford.edu Tue Oct 9 08:49:27 2001 From: mbartsch at snf.stanford.edu (mbartsch at snf.stanford.edu) Date: Oct 9, 2001 8:49:27 PM Subject: Problem svgcoat 2001-10-09 20:49:25: Prgram 5 (10um, no EBR) will not spin after coating Message-ID: Both last night and tonight I have tried to use program 5 to obtain a 10um non-EBR coating, and on every attempt the coater has fai8led to spin the wafer after putting down the slug of resist. I have tried every permutation of coater parameters which seems reasonable and consistent with both the way it worked in the past, and with the currently published version of program 4 (my template for 10um resist coating). When I run prgram 5 as a modified version of program 4 (eliminating wash and post-wash spins and adjusting the 40s spin speed for a 10um coat), the coater seems to stop at the beginning of either step 4 or 5...I have not been able to determine which. Any suggestions would be greatly appreciated... EBR is nice, but given the amount of trouble it has caused lately, we should be able to reliably coat wafers without EBR. Thanks for your help. From vilanova at snf.stanford.edu Wed Oct 10 10:57:55 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 10, 2001 10:57:55 AM Subject: Problem svgcoat 2001-10-09 20:05:43: kink in 3612 line Message-ID: we could'nt find any problems on the 3612 Line From vilanova at snf.stanford.edu Wed Oct 10 10:58:55 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 10, 2001 10:58:55 AM Subject: Problem svgcoat 2001-10-09 20:49:25: Prgram 5 (10um, no EBR) will not spin after coating Message-ID: Tested it Working ok, ready to use From gyama at snf.stanford.edu Thu Oct 11 04:43:45 2001 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Oct 11, 2001 4:43:45 PM Subject: Problem svgcoat 2001-10-11 16:43:44: dripping during spin Message-ID: From true at snf.stanford.edu Thu Oct 11 08:24:44 2001 From: true at snf.stanford.edu (true at snf.stanford.edu) Date: Oct 11, 2001 8:24:44 PM Subject: Problem svgcoat 2001-10-11 20:24:43: broke 2 wafers Message-ID: broke 2 wafers tonight on prime station. From yyao at snf.stanford.edu Fri Oct 12 03:22:30 2001 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Oct 12, 2001 3:22:30 AM Subject: Problem svgcoat 2001-10-12 03:22:29: prime side breaks wafers Message-ID: From vilanova at snf.stanford.edu Fri Oct 12 10:37:41 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 12, 2001 10:37:41 AM Subject: Problem svgcoat 2001-10-11 16:43:44: dripping during spin Message-ID: NO dripping during spin Program #2 tested it with several wafers and it worked ok. From vilanova at snf.stanford.edu Fri Oct 12 10:38:58 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 12, 2001 10:38:58 AM Subject: Problem svgcoat 2001-10-11 20:24:43: broke 2 wafers Message-ID: Hotplate vacuum line found out of place, Cleaned Plate tested it , working Ok ready to use From vilanova at snf.stanford.edu Fri Oct 12 10:39:26 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 12, 2001 10:39:26 AM Subject: Problem svgcoat 2001-10-12 03:22:29: prime side breaks wafers Message-ID: hotplate cleaned , tested it , ran several wafers working ok From dton at snf.stanford.edu Fri Oct 12 05:27:28 2001 From: dton at snf.stanford.edu (dton at snf.stanford.edu) Date: Oct 12, 2001 5:27:28 PM Subject: Problem svgcoat 2001-10-12 17:27:27: HMDS station is messed up Message-ID: There is too much vacuum when it tried to raise the top plate & it kept popping. Dinh From fhj at snf.stanford.edu Mon Oct 15 07:22:16 2001 From: fhj at snf.stanford.edu (fhj at snf.stanford.edu) Date: Oct 15, 2001 7:22:16 AM Subject: Problem svgcoat 2001-10-15 07:22:14: SVG coater HMDS cover Message-ID: While processing a wafer through the HMDS, the cover closed and wouldn't open back up. Wafer is currently stuck on HMDS hotplate. From gyama at snf.stanford.edu Mon Oct 15 10:10:16 2001 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Oct 15, 2001 10:10:16 AM Subject: Problem svgcoat 2001-10-15 10:10:14: HMDS low? adhesion problems on oxide Message-ID: From jasmine at snf.stanford.edu Mon Oct 15 02:09:00 2001 From: jasmine at snf.stanford.edu (jasmine at snf.stanford.edu) Date: Oct 15, 2001 2:09:00 PM Subject: Comment svgcoat 2001-10-15 14:09:00: svg coater..hot plate track Message-ID: all the tracks are moving apart from the hot plate track. From vilanova at snf.stanford.edu Tue Oct 16 08:20:46 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 16, 2001 8:20:46 AM Subject: Problem svgcoat 2001-10-12 17:27:27: HMDS station is messed up Message-ID: Problem Cleared , Ok to use From vilanova at snf.stanford.edu Tue Oct 16 08:33:17 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 16, 2001 8:33:17 AM Subject: Problem svgcoat 2001-10-15 07:22:14: SVG coater HMDS cover Message-ID: SVG COATER WORKING OK, READY TO USE From vilanova at snf.stanford.edu Tue Oct 16 08:37:01 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 16, 2001 8:37:01 AM Subject: Problem svgcoat 2001-10-15 10:10:14: HMDS low? adhesion problems on oxide Message-ID: system tested it , working ok, ready to use From vilanova at snf.stanford.edu Tue Oct 16 08:37:33 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 16, 2001 8:37:33 AM Subject: Shutdown svgcoat 2001-10-15 17:26:16: resist waste Message-ID: System Ok , Ready to use From rcandler at snf.stanford.edu Mon Oct 22 02:55:17 2001 From: rcandler at snf.stanford.edu (rcandler at snf.stanford.edu) Date: Oct 22, 2001 2:55:17 PM Subject: Problem svgcoat 2001-10-22 14:55:16: timer runs slowly Message-ID: The timer for the coater/bake runs at approximately half speed. The HMDS timer seems to run normally From martinez at snf.stanford.edu Mon Oct 22 03:39:40 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 22, 2001 3:39:40 PM Subject: Problem svgcoat 2001-10-22 14:55:16: timer runs slowly Message-ID: reseated cpu pcb, cycled test wafer. all functions back to normal. ready for use. From mbartsch at snf.stanford.edu Thu Oct 25 10:50:56 2001 From: mbartsch at snf.stanford.edu (mbartsch at snf.stanford.edu) Date: Oct 25, 2001 10:50:56 PM Subject: Problem svgcoat 2001-10-25 22:50:55: Unload Cassette Sensor Problem Message-ID: The sensor on the unload cassette often fails to see the wafers in the cassette, resulting in a premature homing of the cassette and an interruption of the process flow. From vilanova at snf.stanford.edu Fri Oct 26 08:00:40 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 26, 2001 8:00:40 AM Subject: Problem svgcoat 2001-10-25 22:50:55: Unload Cassette Sensor Problem Message-ID: i checked the Sensor and Everything s working fine. I tested it , I ran Several wafers and worked Ok. No problem Found, Ready to use. From yetao at snf.stanford.edu Wed Oct 31 09:56:15 2001 From: yetao at snf.stanford.edu (yetao at snf.stanford.edu) Date: Oct 31, 2001 9:56:15 PM Subject: Problem svgcoat 2001-10-31 21:56:13: prebake oven down Message-ID: Somehow doesn't work.