Problem svgcoat 2001-10-09 20:05:43: kink in 3612 line

tkramer at snf.stanford.edu tkramer at snf.stanford.edu
Tue Oct 9 08:05:44 PDT 2001


There appears to be a kink in the 3612 line, possibly leading to air bubbles.  It is about an inch from the dispense end of the line.  I didn't observe any problem with my wafers.




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