Problem svgcoat 2001-10-15 07:22:14: SVG coater HMDS cover

fhj at snf.stanford.edu fhj at snf.stanford.edu
Mon Oct 15 07:22:16 PDT 2001


While processing a wafer through the HMDS, the cover closed and wouldn't open back up. Wafer is currently stuck on HMDS hotplate.




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