Problem svgcoat 2001-10-25 22:50:55: Unload Cassette Sensor Problem

mbartsch at snf.stanford.edu mbartsch at snf.stanford.edu
Thu Oct 25 10:50:56 PDT 2001


The sensor on the unload cassette often fails to see the wafers in the cassette, resulting in a premature homing of the cassette and an interruption of the process flow.  




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