Problem svgcoat 2001-10-25 22:50:55: Unload Cassette Sensor Problem

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Oct 26 08:00:40 PDT 2001


i checked the Sensor and Everything s working fine.
I tested it , I ran Several wafers and worked Ok.
No problem Found, Ready to use.




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