From mahnaz at snf.stanford.edu Tue Sep 4 10:45:38 2001 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Sep 4, 2001 10:45:38 AM Subject: Shutdown svgcoat 2001-09-04 10:45:36: no ebr Message-ID: From martinez at snf.stanford.edu Tue Sep 4 12:48:47 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 4, 2001 12:48:47 PM Subject: Shutdown svgcoat 2001-09-04 10:45:36: no ebr Message-ID: adj ebr flow and pressure. cycled 8 test wafers. ready for use. From martinez at snf.stanford.edu Tue Sep 4 12:49:28 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 4, 2001 12:49:28 PM Subject: Comment svgcoat 2001-09-04 12:49:28: ebr Message-ID: adj ebr flow and pressure. cycled 8 test wafers with good results. ready for use. From mahnaz at snf.stanford.edu Tue Sep 4 04:06:00 2001 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Sep 4, 2001 4:06:00 PM Subject: Problem svgcoat 2001-09-04 16:05:55: not releasing Message-ID: after spin the spin chuck does not release the wafers in time and wafers get stuck on top of the other wafers. From martinez at snf.stanford.edu Tue Sep 4 09:12:22 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 4, 2001 9:12:22 PM Subject: Problem svgcoat 2001-09-04 16:05:55: not releasing Message-ID: cycled test wafers and could not duplicate problem. From martinez at snf.stanford.edu Thu Sep 6 11:17:37 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 6, 2001 11:17:37 AM Subject: Shutdown svgcoat 2001-09-06 11:17:32: svgcoat Message-ID: weekly pm From mahnaz at snf.stanford.edu Thu Sep 6 02:17:43 2001 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Sep 6, 2001 2:17:43 PM Subject: Shutdown svgcoat 2001-09-06 11:17:32: svgcoat Message-ID: Mike did the pm and changed the carboy. From mahnaz at snf.stanford.edu Thu Sep 6 02:18:19 2001 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Sep 6, 2001 2:18:19 PM Subject: Problem svgcoat 2001-09-05 14:49:00: EBR not working Message-ID: Mike is telling me that he has taken care of the problem. From chion at snf.stanford.edu Fri Sep 7 04:50:10 2001 From: chion at snf.stanford.edu (chion at snf.stanford.edu) Date: Sep 7, 2001 4:50:10 PM Subject: Problem svgcoat 2001-09-07 16:50:04: Wafer dropped in HMDS section. Message-ID: The metal wafer liners could hold the wafer properly. The wafer went between the lines and was cracked. From martinez at snf.stanford.edu Mon Sep 10 12:53:18 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 10, 2001 12:53:18 PM Subject: Problem svgcoat 2001-09-07 16:50:04: Wafer dropped in HMDS section. Message-ID: cleaned broken wafer bits from vp chamber, removed several layers of vacuum grease from vp lid and chamber aligned wafer rails and chamber lid. cycled test wafers. ready for use. From josef at snf.stanford.edu Mon Sep 10 02:51:24 2001 From: josef at snf.stanford.edu (josef at snf.stanford.edu) Date: Sep 10, 2001 2:51:24 PM Subject: Problem svgcoat 2001-09-10 14:51:22: Message-ID: Every other wafer gets stuck in HMDS. From martinez at snf.stanford.edu Mon Sep 10 05:51:34 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 10, 2001 5:51:34 PM Subject: Problem svgcoat 2001-09-10 14:51:22: clear Message-ID: realigned vp lid, cycled 20 wafers on prog#1 with no vac errors. From suzanne at snf.stanford.edu Wed Sep 12 10:58:53 2001 From: suzanne at snf.stanford.edu (suzanne at snf.stanford.edu) Date: Sep 12, 2001 10:58:53 AM Subject: Shutdown svgcoat 2001-09-12 10:58:41: broken wafer Message-ID: wafer broke in hmds on coater From mahnaz at snf.stanford.edu Wed Sep 12 11:24:27 2001 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Sep 12, 2001 11:24:27 AM Subject: Shutdown svgcoat 2001-09-12 10:58:41: broken wafer Message-ID: I vaccumed and cleaned the hot plate. needs to be fixed. Ok to use for now. From beckwith at snf.stanford.edu Wed Sep 12 12:40:36 2001 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Sep 12, 2001 12:40:36 PM Subject: Problem svgcoat 2001-09-12 12:40:32: vapor prime lid not sealing Message-ID: the lid must be held down manually in order to get it to work...not recommended for novice users! From martinez at snf.stanford.edu Thu Sep 13 03:02:35 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 13, 2001 3:02:35 PM Subject: Shutdown svgcoat 2001-09-13 15:02:27: svg Message-ID: weekly pm From martinez at snf.stanford.edu Thu Sep 13 03:56:28 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 13, 2001 3:56:28 PM Subject: Shutdown svgcoat 2001-09-13 15:02:27: svg Message-ID: weekly pm completed. ready for use From martinez at snf.stanford.edu Thu Sep 13 03:58:00 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 13, 2001 3:58:00 PM Subject: Problem svgcoat 2001-09-12 12:40:32: vapor prime lid not sealing Message-ID: cycled test wafers through program #1 on vp. tested ok From manjot at snf.stanford.edu Fri Sep 14 10:53:01 2001 From: manjot at snf.stanford.edu (manjot at snf.stanford.edu) Date: Sep 14, 2001 10:53:01 AM Subject: Problem svgcoat 2001-09-14 10:53:00: The vacuum on the HMDS still alarming, need help every time. Message-ID: From vilanova at snf.stanford.edu Mon Sep 17 09:17:22 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sep 17, 2001 9:17:22 AM Subject: Problem svgcoat 2001-09-14 10:53:00: The vacuum on the HMDS still alarming, need help every time. Message-ID: Cleaned Hotplate, Gaskets, Tested it , working Ok ready to use From pbrink at snf.stanford.edu Mon Sep 17 06:28:15 2001 From: pbrink at snf.stanford.edu (pbrink at snf.stanford.edu) Date: Sep 17, 2001 6:28:15 PM Subject: Problem svgcoat 2001-09-17 18:28:13: svgcoat rpm rate too low Message-ID: the chuck spins around very slowly, something stuck? Paul. From martinez at snf.stanford.edu Mon Sep 17 06:42:58 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 17, 2001 6:42:58 PM Subject: Shutdown svgcoat 2001-09-17 18:42:57: svgcoat Message-ID: cannot calibrate high speed motor. From martinez at snf.stanford.edu Mon Sep 17 09:14:41 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 17, 2001 9:14:41 PM Subject: Shutdown svgcoat 2001-09-17 18:42:57: svgcoat Message-ID: replaced and calibrated spindle. ready for use From martinez at snf.stanford.edu Mon Sep 17 09:15:07 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 17, 2001 9:15:07 PM Subject: Problem svgcoat 2001-09-17 18:28:13: svgcoat rpm rate too low Message-ID: replaced and calibrated spindle. From wliu at snf.stanford.edu Tue Sep 18 12:13:37 2001 From: wliu at snf.stanford.edu (wliu at snf.stanford.edu) Date: Sep 18, 2001 12:13:37 AM Subject: Problem svgcoat 2001-09-18 00:13:36: wafer chuck vacuum Message-ID: there's a problem with the wafer chuck vacuum From vilanova at snf.stanford.edu Tue Sep 18 07:52:01 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sep 18, 2001 7:52:01 AM Subject: Problem svgcoat 2001-09-18 00:13:36: wafer chuck vacuum Message-ID: Wafer Chuck Vacuum Ok , I ran several wafers And system Worked Ok, Ready to use From cmfaulkn at snf.stanford.edu Wed Sep 19 10:02:04 2001 From: cmfaulkn at snf.stanford.edu (cmfaulkn at snf.stanford.edu) Date: Sep 19, 2001 10:02:04 PM Subject: Problem svgcoat 2001-09-19 22:02:02: HMDS poor Message-ID: I have resist adhesion problems on approx. 1um lines that appear to be due to the HMDS. From balaji at snf.stanford.edu Fri Sep 21 01:10:56 2001 From: balaji at snf.stanford.edu (balaji at snf.stanford.edu) Date: Sep 21, 2001 1:10:56 PM Subject: Problem svgcoat 2001-09-21 13:10:55: HMDS broke wafer Message-ID: From balaji at snf.stanford.edu Fri Sep 21 01:17:43 2001 From: balaji at snf.stanford.edu (balaji at snf.stanford.edu) Date: Sep 21, 2001 1:17:43 PM Subject: Shutdown svgcoat 2001-09-21 13:17:43: wafer broken in HMDS Message-ID: From vilanova at snf.stanford.edu Fri Sep 21 03:18:44 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sep 21, 2001 3:18:44 PM Subject: Problem svgcoat 2001-09-21 13:10:55: HMDS broke wafer Message-ID: cleaned HMDS : Gaskets, And Plate tested it Working Ok ready to use. You Still have to press down the Lid to get HMDS Vacuum From vilanova at snf.stanford.edu Fri Sep 21 03:19:17 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sep 21, 2001 3:19:17 PM Subject: Shutdown svgcoat 2001-09-21 13:17:43: wafer broken in HMDS Message-ID: HMDS Plate and Gaskets, Tested it ready to use From martinez at snf.stanford.edu Tue Sep 25 01:09:01 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 25, 2001 1:09:01 PM Subject: Problem svgcoat 2001-09-19 22:02:02: HMDS poor Message-ID: aligned vapor prime air cylinder and vp lid, cycled wafers with no problems. replaced ebr nozzle, adj tank pressure and EC-13 rate of flow. ready for use. From manjot at snf.stanford.edu Tue Sep 25 02:08:08 2001 From: manjot at snf.stanford.edu (manjot at snf.stanford.edu) Date: Sep 25, 2001 2:08:08 PM Subject: Problem svgcoat 2001-09-25 14:08:07: The back splash problem got worse and is more towards the centre of the wafer. Message-ID: From cmfaulkn at snf.stanford.edu Wed Sep 26 12:47:19 2001 From: cmfaulkn at snf.stanford.edu (cmfaulkn at snf.stanford.edu) Date: Sep 26, 2001 12:47:19 AM Subject: Problem svgcoat 2001-09-26 00:47:18: vacuum bake not working Message-ID: Someone broke a wafer in the vacuum bake and even though it was cleaned up, the vacuum bake closes once and then alarms. Reseting power did not help. From vilanova at snf.stanford.edu Wed Sep 26 08:52:09 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sep 26, 2001 8:52:09 AM Subject: Problem svgcoat 2001-09-26 00:47:18: vacuum bake not working Message-ID: I've Cleaned The Plate, I found The wafer rails Loose. Tech From UTS will bring the parts we need to fix the Splash Problem an also the Vapor Prime Problem. From vilanova at snf.stanford.edu Wed Sep 26 11:07:43 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sep 26, 2001 11:07:43 AM Subject: Shutdown svgcoat 2001-09-26 11:07:42: Message-ID: From vilanova at snf.stanford.edu Wed Sep 26 01:38:21 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sep 26, 2001 1:38:21 PM Subject: Problem svgcoat 2001-09-25 14:08:07: The back splash problem got worse and is more towards the centre of the wafer. Message-ID: We have Adjusted the vapor prime Cylinder, Replaced EBR Flow Controller and Nozzle, tested it Looks Ok We Will have to add a EBR for the Top Side Cause if we increase the flow from the one on the bottom wi will get Splashes On the Wafer. We Will get a QUote from Uts Today and they will come to Instale it ASAP . Ready to use From vilanova at snf.stanford.edu Wed Sep 26 01:39:42 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Sep 26, 2001 1:39:42 PM Subject: Shutdown svgcoat 2001-09-26 11:07:42: Message-ID: Replaced Nozzle, Mass Flow Controller and Air Cilinder Ready to use . Please do not Adjust Anything.