Problem svgcoat 2001-09-07 16:50:04: Wafer dropped in HMDS section.

martinez at snf.stanford.edu martinez at snf.stanford.edu
Mon Sep 10 12:53:18 PDT 2001


cleaned broken wafer bits from vp chamber, removed 
several layers of vacuum grease from vp lid and chamber
aligned wafer rails and chamber lid. cycled test wafers.
ready for use.




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