Problem svgcoat 2001-09-21 13:10:55: HMDS broke wafer

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Sep 21 03:18:44 PDT 2001


cleaned HMDS : Gaskets, And Plate tested it
Working Ok ready to use.
You Still have to press down the Lid to get HMDS Vacuum




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