Problem svgcoat 2001-09-19 22:02:02: HMDS poor

martinez at snf.stanford.edu martinez at snf.stanford.edu
Tue Sep 25 01:09:01 PDT 2001


aligned vapor prime air cylinder and vp lid, cycled wafers
with no problems. replaced ebr nozzle, adj tank pressure
and EC-13 rate of flow.  ready for use.




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