Problem svgcoat 2001-09-26 00:47:18: vacuum bake not working

cmfaulkn at snf.stanford.edu cmfaulkn at snf.stanford.edu
Wed Sep 26 12:47:19 PDT 2001


Someone broke a wafer in the vacuum bake and even though it was cleaned up, the vacuum bake closes once and then alarms.  Reseting power did not help.




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