Problem svgcoat 2001-09-25 14:08:07: The back splash problem got worse and is more towards the centre of the wafer.

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Sep 26 01:38:21 PDT 2001


We have Adjusted the vapor prime Cylinder, Replaced 
EBR Flow Controller and Nozzle, tested it Looks Ok
We Will have to add a EBR for the Top Side Cause if we
increase the flow from the one on the bottom wi will get
Splashes On the Wafer. We Will get a QUote from Uts Today
and they will come to Instale it ASAP . Ready to use




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