September 2001 Archives by author

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Starting: Tue Sep 4 04:06:00 PDT 2001
Ending: Wed Sep 26 12:47:19 PDT 2001
Messages: 38

• Problem svgcoat 2001-09-21 13:10:55: HMDS broke wafer   balaji at snf.stanford.edu
• Shutdown svgcoat 2001-09-21 13:17:43: wafer broken in HMDS   balaji at snf.stanford.edu
• Problem svgcoat 2001-09-12 12:40:32: vapor prime lid not sealing   beckwith at snf.stanford.edu
• Problem svgcoat 2001-09-07 16:50:04: Wafer dropped in HMDS section.   chion at snf.stanford.edu
• Problem svgcoat 2001-09-19 22:02:02: HMDS poor   cmfaulkn at snf.stanford.edu
• Problem svgcoat 2001-09-26 00:47:18: vacuum bake not working   cmfaulkn at snf.stanford.edu
• Problem svgcoat 2001-09-10 14:51:22:   josef at snf.stanford.edu
• Problem svgcoat 2001-09-04 16:05:55: not releasing   mahnaz at snf.stanford.edu
• Shutdown svgcoat 2001-09-04 10:45:36: no ebr   mahnaz at snf.stanford.edu
• Shutdown svgcoat 2001-09-06 11:17:32: svgcoat   mahnaz at snf.stanford.edu
• Problem svgcoat 2001-09-05 14:49:00: EBR not working   mahnaz at snf.stanford.edu
• Shutdown svgcoat 2001-09-12 10:58:41: broken wafer   mahnaz at snf.stanford.edu
• Problem svgcoat 2001-09-14 10:53:00: The vacuum on the HMDS still alarming, need help every time.   manjot at snf.stanford.edu
• Problem svgcoat 2001-09-25 14:08:07: The back splash problem got worse and is more towards the centre of the wafer.   manjot at snf.stanford.edu
• Problem svgcoat 2001-09-04 16:05:55: not releasing   martinez at snf.stanford.edu
• Shutdown svgcoat 2001-09-04 10:45:36: no ebr   martinez at snf.stanford.edu
• Comment svgcoat 2001-09-04 12:49:28: ebr   martinez at snf.stanford.edu
• Shutdown svgcoat 2001-09-06 11:17:32: svgcoat   martinez at snf.stanford.edu
• Problem svgcoat 2001-09-10 14:51:22: clear   martinez at snf.stanford.edu
• Problem svgcoat 2001-09-07 16:50:04: Wafer dropped in HMDS section.   martinez at snf.stanford.edu
• Shutdown svgcoat 2001-09-13 15:02:27: svg   martinez at snf.stanford.edu
• Shutdown svgcoat 2001-09-13 15:02:27: svg   martinez at snf.stanford.edu
• Problem svgcoat 2001-09-12 12:40:32: vapor prime lid not sealing   martinez at snf.stanford.edu
• Shutdown svgcoat 2001-09-17 18:42:57: svgcoat   martinez at snf.stanford.edu
• Shutdown svgcoat 2001-09-17 18:42:57: svgcoat   martinez at snf.stanford.edu
• Problem svgcoat 2001-09-17 18:28:13: svgcoat rpm rate too low   martinez at snf.stanford.edu
• Problem svgcoat 2001-09-19 22:02:02: HMDS poor   martinez at snf.stanford.edu
• Problem svgcoat 2001-09-17 18:28:13: svgcoat rpm rate too low   pbrink at snf.stanford.edu
• Shutdown svgcoat 2001-09-12 10:58:41: broken wafer   suzanne at snf.stanford.edu
• Problem svgcoat 2001-09-14 10:53:00: The vacuum on the HMDS still alarming, need help every time.   vilanova at snf.stanford.edu
• Problem svgcoat 2001-09-18 00:13:36: wafer chuck vacuum   vilanova at snf.stanford.edu
• Problem svgcoat 2001-09-21 13:10:55: HMDS broke wafer   vilanova at snf.stanford.edu
• Shutdown svgcoat 2001-09-21 13:17:43: wafer broken in HMDS   vilanova at snf.stanford.edu
• Problem svgcoat 2001-09-25 14:08:07: The back splash problem got worse and is more towards the centre of the wafer.   vilanova at snf.stanford.edu
• Shutdown svgcoat 2001-09-26 11:07:42:   vilanova at snf.stanford.edu
• Problem svgcoat 2001-09-26 00:47:18: vacuum bake not working   vilanova at snf.stanford.edu
• Shutdown svgcoat 2001-09-26 11:07:42:   vilanova at snf.stanford.edu
• Problem svgcoat 2001-09-18 00:13:36: wafer chuck vacuum   wliu at snf.stanford.edu

Last message date: Wed Sep 26 12:47:19 PDT 2001
Archived on: Fri Jan 11 13:12:03 PST 2013

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