From wliu at snf.stanford.edu  Wed Apr  3 09:57:09 2002
From: wliu at snf.stanford.edu (wliu at snf.stanford.edu)
Date: Apr 3, 2002 9:57:09 PM
Subject: Problem svgcoat 2002-04-03 21:57:08: 3612 photoresist drips after normal dispensing onto wafer
Message-ID: <mailman.385.1357938700.25882.svgcoat-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Thu Apr  4 07:56:26 2002
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Apr 4, 2002 7:56:26 AM
Subject: Problem svgcoat 2002-04-03 21:57:08: 3612 photoresist drips after normal dispensing onto wafer
Message-ID: <mailman.386.1357938700.25882.svgcoat-pcs@snf.stanford.edu>

Replaced Empty Resist Bottle, Tested, Working ok
Please check the Resist Bottle "before" you run your 
Wafer, Ok to use.



From martinez at snf.stanford.edu  Tue Apr  9 07:48:45 2002
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Apr 9, 2002 7:48:45 AM
Subject: Shutdown svgcoat 2002-04-09 07:48:44: WPM
Message-ID: <mailman.387.1357938700.25882.svgcoat-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Tue Apr  9 08:22:41 2002
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Apr 9, 2002 8:22:41 AM
Subject: Shutdown svgcoat 2002-04-09 07:48:44: WPM
Message-ID: <mailman.388.1357938700.25882.svgcoat-pcs@snf.stanford.edu>

Weekly Maintenance Completed, Ok to use



From sminne at snf.stanford.edu  Tue Apr  9 02:09:44 2002
From: sminne at snf.stanford.edu (sminne at snf.stanford.edu)
Date: Apr 9, 2002 2:09:44 PM
Subject: Problem svgcoat 2002-04-09 14:09:43: rec. cas. would not go down
Message-ID: <mailman.389.1357938700.25882.svgcoat-pcs@snf.stanford.edu>




From martinez at snf.stanford.edu  Tue Apr  9 03:26:04 2002
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Apr 9, 2002 3:26:04 PM
Subject: Problem svgcoat 2002-04-09 14:09:43: rec. cas. would not go down
Message-ID: <mailman.390.1357938700.25882.svgcoat-pcs@snf.stanford.edu>

track was in manual mode. ok to use



From hlkung at snf.stanford.edu  Sun Apr 14 10:25:31 2002
From: hlkung at snf.stanford.edu (hlkung at snf.stanford.edu)
Date: Apr 14, 2002 10:25:31 AM
Subject: Problem svgcoat 2002-04-14 10:25:30: found track 1 resist light on. Audible alarm turned off.  very little resist in bottle
Message-ID: <mailman.391.1357938700.25882.svgcoat-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Mon Apr 15 07:37:04 2002
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Apr 15, 2002 7:37:04 AM
Subject: Problem svgcoat 2002-04-14 10:25:30: found track 1 resist light on. Audible alarm turned off.  very little resist in bottle
Message-ID: <mailman.392.1357938700.25882.svgcoat-pcs@snf.stanford.edu>

Resist bottle replaced, tested, working ok ready to use



From vilanova at snf.stanford.edu  Mon Apr 15 10:10:24 2002
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Apr 15, 2002 10:10:24 AM
Subject: Shutdown svgcoat 2002-04-15 10:10:24: PM in Progress
Message-ID: <mailman.393.1357938700.25882.svgcoat-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Mon Apr 15 10:56:38 2002
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Apr 15, 2002 10:56:38 AM
Subject: Shutdown svgcoat 2002-04-15 10:10:24: PM in Progress
Message-ID: <mailman.394.1357938700.25882.svgcoat-pcs@snf.stanford.edu>

Pm Completed



From aaronp at snf.stanford.edu  Tue Apr 16 11:38:02 2002
From: aaronp at snf.stanford.edu (aaronp at snf.stanford.edu)
Date: Apr 16, 2002 11:38:02 PM
Subject: Problem svgcoat 2002-04-16 23:38:01: load elevator does not start
Message-ID: <mailman.395.1357938700.25882.svgcoat-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Wed Apr 17 07:48:09 2002
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Apr 17, 2002 7:48:09 AM
Subject: Problem svgcoat 2002-04-16 23:38:01: load elevator does not start
Message-ID: <mailman.396.1357938700.25882.svgcoat-pcs@snf.stanford.edu>

Load Elevator Indexer Sensor screw found Loose.
Fixed it , ok to use