Problem svgcoat 2002-04-03 21:57:08: 3612 photoresist drips after normal dispensing onto wafer

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Apr 4 07:56:26 PST 2002


Replaced Empty Resist Bottle, Tested, Working ok
Please check the Resist Bottle "before" you run your 
Wafer, Ok to use.




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