Problem svgcoat 2002-04-09 14:09:43: rec. cas. would not go down
sminne at snf.stanford.edu
sminne at snf.stanford.edu
Tue Apr 9 02:09:44 PDT 2002
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Problem svgcoat 2002-04-03 21:57:08: 3612 photoresist drips after normal dispensing onto wafer
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Problem svgcoat 2002-04-09 14:09:43: rec. cas. would not go down
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Problem svgcoat 2002-04-03 21:57:08: 3612 photoresist drips after normal dispensing onto wafer
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Problem svgcoat 2002-04-09 14:09:43: rec. cas. would not go down
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