From dtchang at snf.stanford.edu Mon Aug 5 06:39:38 2002 From: dtchang at snf.stanford.edu (dtchang at snf.stanford.edu) Date: Aug 5, 2002 6:39:38 PM Subject: Problem svgcoat 2002-08-05 18:39:38: resist dispense drips Message-ID: unit drips after resist(1.6 microns) is dispensed. I tried to clean the head but it does not help. the dispense is okay, but when it stops dispensing, it begins to drip. From vilanova at snf.stanford.edu Tue Aug 6 08:22:58 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 6, 2002 8:22:58 AM Subject: Problem svgcoat 2002-08-05 18:39:38: resist dispense drips Message-ID: Suck back Adjusted. From saras at snf.stanford.edu Thu Aug 8 01:31:19 2002 From: saras at snf.stanford.edu (saras at snf.stanford.edu) Date: Aug 8, 2002 1:31:19 AM Subject: Problem svgcoat 2002-08-08 01:31:17: resist on prebake plate Message-ID: I'm pretty sure I did this, though I'm not sure what I did wrong. I was trying to put down 7um resist w/o the edgebead removal, and I wanted to do the normal bake at the end. I think maybe there was just too much resist on the dummy wafers I ran at the beginning, and it left the rings around the sides? So I stoped the machine before I got to my actual wafer, so I don't know if it would have been ok for a wafer w/o any resist. I'm sorry for this problem, and I feel really badly if this will be hard to clean off. From vilanova at snf.stanford.edu Thu Aug 8 07:41:49 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 8, 2002 7:41:49 AM Subject: Problem svgcoat 2002-08-08 01:31:17: resist on prebake plate Message-ID: Pre bake Hotplate Cleaned, Ok to use :-) From vilanova at snf.stanford.edu Fri Aug 9 10:09:38 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 9, 2002 10:09:38 AM Subject: Shutdown svgcoat 2002-08-09 10:09:37: weekly Preventive Maintenance in progress Message-ID: From vilanova at snf.stanford.edu Fri Aug 9 11:04:34 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 9, 2002 11:04:34 AM Subject: Shutdown svgcoat 2002-08-09 10:09:37: weekly Preventive Maintenance in progress Message-ID: Weekly Preventive Maintenance Completed. Ok To Use. :-) From crichter at snf.stanford.edu Tue Aug 13 11:22:37 2002 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Aug 13, 2002 11:22:37 AM Subject: Problem svgcoat 2002-08-13 11:22:36: resist stains on vapor primer plate Message-ID: From vilanova at snf.stanford.edu Tue Aug 13 01:18:08 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 13, 2002 1:18:08 PM Subject: Problem svgcoat 2002-08-13 11:22:36: resist stains on vapor primer plate Message-ID: resist stains removed from plate. Ok to use :-) From eadens at snf.stanford.edu Tue Aug 13 05:57:59 2002 From: eadens at snf.stanford.edu (eadens at snf.stanford.edu) Date: Aug 13, 2002 5:57:59 PM Subject: Problem svgcoat 2002-08-13 17:57:59: it does not work Message-ID: someone broke a wafer From vilanova at snf.stanford.edu Wed Aug 14 08:18:01 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 14, 2002 8:18:01 AM Subject: Problem svgcoat 2002-08-13 17:57:59: it does not work Message-ID: found small piece of wafer in catch cup, cleaned, working ok,. Ready to use. :-) From vilanova at snf.stanford.edu Thu Aug 15 09:48:40 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 15, 2002 9:48:40 AM Subject: Shutdown svgcoat 2002-08-15 09:48:37: weekly maintenance in progress.... Message-ID: From vilanova at snf.stanford.edu Thu Aug 15 10:24:40 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 15, 2002 10:24:40 AM Subject: Shutdown svgcoat 2002-08-15 09:48:37: weekly maintenance in progress.... Message-ID: Weekly Pm Completed . Ok to use :-) From hanjun at snf.stanford.edu Mon Aug 19 03:08:32 2002 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Aug 19, 2002 3:08:32 PM Subject: Problem svgcoat 2002-08-19 15:08:32: chiller sensor is not sensitive enough Message-ID: When a wafer arrives where the sensor is on the chiller plate, it doesn't recognize it, misses the wafer, and beeps alarm. From vilanova at snf.stanford.edu Tue Aug 20 07:40:08 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 20, 2002 7:40:08 AM Subject: Problem svgcoat 2002-08-19 15:08:32: chiller sensor is not sensitive enough Message-ID: I've ran Several Wafers and the Cooling Wafer Sensor works perfectly Fine. User error. Ok to use :-) From vilanova at snf.stanford.edu Tue Aug 20 10:45:45 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 20, 2002 10:45:45 AM Subject: Shutdown svgcoat 2002-08-20 09:25:37: wpm Message-ID: wpm Completed From mahnaz at snf.stanford.edu Tue Aug 20 03:57:42 2002 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Aug 20, 2002 3:57:42 PM Subject: Problem svgcoat 2002-08-20 15:57:38: extra drop Message-ID: I ran 10 wafers with prog. 7 (1 um) , extra drop in the begining causing uniformity problems and the lock key is broken. it works in both condition lock and program. From martinez at snf.stanford.edu Tue Aug 20 04:55:50 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 20, 2002 4:55:50 PM Subject: Problem svgcoat 2002-08-20 15:57:38: extra drop Message-ID: adj draw back, cycled test wafers. ready for use From tomada at snf.stanford.edu Wed Aug 21 05:21:34 2002 From: tomada at snf.stanford.edu (tomada at snf.stanford.edu) Date: Aug 21, 2002 5:21:34 PM Subject: Shutdown svgcoat 2002-08-21 17:21:32: SVGCoat 1 Message-ID: Dispence Arm doesn't move and program then stalls. From gyama at snf.stanford.edu Fri Aug 23 09:32:07 2002 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Aug 23, 2002 9:32:07 AM Subject: Problem svgcoat 2002-08-23 09:32:06: out of 3612, Mike knows Message-ID: From martinez at snf.stanford.edu Fri Aug 23 10:29:04 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 23, 2002 10:29:04 AM Subject: Shutdown svgcoat 2002-08-21 17:21:32: SVGCoat 1 Message-ID: replaced resist bottle From martinez at snf.stanford.edu Fri Aug 23 10:29:22 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 23, 2002 10:29:22 AM Subject: Problem svgcoat 2002-08-23 09:32:06: out of 3612, Mike knows Message-ID: problem cleared From uli at snf.stanford.edu Tue Aug 27 03:14:18 2002 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Aug 27, 2002 3:14:18 PM Subject: Problem svgcoat 2002-08-27 15:14:18: EBR on track one too large and not uniform Message-ID: Mahnaz says its because the pressure in the system is too low From martinez at snf.stanford.edu Tue Aug 27 04:31:21 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 27, 2002 4:31:21 PM Subject: Problem svgcoat 2002-08-27 15:14:18: EBR on track one too large and not uniform Message-ID: adj nozzle. ready for use From tzewee at snf.stanford.edu Tue Aug 27 05:33:58 2002 From: tzewee at snf.stanford.edu (tzewee at snf.stanford.edu) Date: Aug 27, 2002 5:33:58 PM Subject: Shutdown svgcoat 2002-08-27 17:33:57: Shattered wafer in track 1 Message-ID: Dear Staff, I was trying to spin 1 micron 3612 on wafer when it shattered in the white bottle. I ran 2 dummies before it and it went well. Everything seemed normal until the wafer shattered. The motor sounded a bit louder than usual, but that's about it. Apologies for any troubles caused. Tze Wee From tzewee at snf.stanford.edu Tue Aug 27 06:01:32 2002 From: tzewee at snf.stanford.edu (tzewee at snf.stanford.edu) Date: Aug 27, 2002 6:01:32 PM Subject: Comment svgcoat 2002-08-27 18:01:32: Wrong track number submitted Message-ID: Dear Staff, Sorry I was a bit too nervous. It is actually track 2 with the problem. Track 1 is fine. Thanks. Tze Wee From martinez at snf.stanford.edu Wed Aug 28 01:33:05 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Aug 28, 2002 1:33:05 PM Subject: Shutdown svgcoat 2002-08-27 17:33:57: Shattered wafer in track 1 Message-ID: problem cleared From vilanova at snf.stanford.edu Fri Aug 30 07:41:53 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 30, 2002 7:41:53 AM Subject: Shutdown svgcoat 2002-08-30 07:41:52: PM In progress Message-ID: Weekly Pm In progress.....l................. From vilanova at snf.stanford.edu Fri Aug 30 08:27:26 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Aug 30, 2002 8:27:26 AM Subject: Shutdown svgcoat 2002-08-30 07:41:52: PM In progress Message-ID: Weekly Pm Completed , Ok to Use . :-)