Problem svgcoat 2002-08-05 18:39:38: resist dispense drips

dtchang at snf.stanford.edu dtchang at snf.stanford.edu
Mon Aug 5 06:39:38 PDT 2002


unit drips after resist(1.6 microns) is dispensed.  I tried to clean the head but it does not help.  the dispense is okay, but when it stops dispensing, it begins to drip.




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