Problem svgcoat 2002-08-19 15:08:32: chiller sensor is not sensitive enough

hanjun at snf.stanford.edu hanjun at snf.stanford.edu
Mon Aug 19 03:08:32 PDT 2002


When a wafer arrives where the sensor is on the chiller plate,
it doesn't recognize it, misses the wafer, and beeps alarm.




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