Problem svgcoat 2002-08-20 15:57:38: extra drop

mahnaz at mahnaz at
Tue Aug 20 03:57:42 PDT 2002

I ran 10 wafers with prog. 7 (1 um) , extra drop in the begining
causing uniformity problems and the lock key is broken. it 
works in both condition lock and program.

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