Problem svgcoat 2002-08-20 15:57:38: extra drop

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Tue Aug 20 03:57:42 PDT 2002


I ran 10 wafers with prog. 7 (1 um) , extra drop in the begining
causing uniformity problems and the lock key is broken. it 
works in both condition lock and program.




More information about the svgcoat-pcs mailing list