Problem svgcoat 2002-08-27 15:14:18: EBR on track one too large and not uniform
martinez at snf.stanford.edu
martinez at snf.stanford.edu
Tue Aug 27 04:31:21 PDT 2002
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Problem svgcoat 2002-08-27 15:14:18: EBR on track one too large and not uniform
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Shutdown svgcoat 2002-08-27 17:33:57: Shattered wafer in track 1
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adj nozzle. ready for use
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Problem svgcoat 2002-08-27 15:14:18: EBR on track one too large and not uniform
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Shutdown svgcoat 2002-08-27 17:33:57: Shattered wafer in track 1
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