Shutdown svgcoat 2002-08-27 17:33:57: Shattered wafer in track 1

tzewee at snf.stanford.edu tzewee at snf.stanford.edu
Tue Aug 27 05:33:58 PDT 2002


Dear Staff,
  I was trying to spin 1 micron 3612 on wafer when it shattered in the white bottle.
  I ran 2 dummies before it and it went well.
  Everything seemed normal until the wafer shattered. The motor sounded a bit louder than usual, but that's about it.
  Apologies for any troubles caused.
Tze Wee




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