Shutdown svgcoat 2002-08-27 17:33:57: Shattered wafer in track 1

tzewee at tzewee at
Tue Aug 27 05:33:58 PDT 2002

Dear Staff,
  I was trying to spin 1 micron 3612 on wafer when it shattered in the white bottle.
  I ran 2 dummies before it and it went well.
  Everything seemed normal until the wafer shattered. The motor sounded a bit louder than usual, but that's about it.
  Apologies for any troubles caused.
Tze Wee

More information about the svgcoat-pcs mailing list