From martinez at snf.stanford.edu  Thu Dec  5 09:17:54 2002
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Dec 5, 2002 9:17:54 AM
Subject: Shutdown svgcoat 2002-12-05 09:17:53: WP{M
Message-ID: <mailman.544.1357938701.25882.svgcoat-pcs@snf.stanford.edu>




From martinez at snf.stanford.edu  Thu Dec  5 10:28:39 2002
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Dec 5, 2002 10:28:39 AM
Subject: Shutdown svgcoat 2002-12-05 09:17:53: WP{M
Message-ID: <mailman.545.1357938701.25882.svgcoat-pcs@snf.stanford.edu>

weekly pm done



From vilanova at snf.stanford.edu  Tue Dec 10 07:30:40 2002
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Dec 10, 2002 7:30:40 AM
Subject: Shutdown svgcoat 2002-12-10 07:30:39: Weekly Pm in progress ........
Message-ID: <mailman.546.1357938701.25882.svgcoat-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Tue Dec 10 08:47:07 2002
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Dec 10, 2002 8:47:07 AM
Subject: Shutdown svgcoat 2002-12-10 07:30:39: Weekly Pm in progress ........
Message-ID: <mailman.547.1357938701.25882.svgcoat-pcs@snf.stanford.edu>

weekly pm completed



From ychliu at snf.stanford.edu  Wed Dec 11 09:08:52 2002
From: ychliu at snf.stanford.edu (ychliu at snf.stanford.edu)
Date: Dec 11, 2002 9:08:52 PM
Subject: Shutdown svgcoat 2002-12-11 21:08:50: wafer stuck in prime oven
Message-ID: <mailman.548.1357938701.25882.svgcoat-pcs@snf.stanford.edu>

dummy wafer



From vilanova at snf.stanford.edu  Thu Dec 12 03:01:03 2002
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Dec 12, 2002 3:01:03 PM
Subject: Shutdown svgcoat 2002-12-11 21:08:50: wafer stuck in prime oven
Message-ID: <mailman.549.1357938701.25882.svgcoat-pcs@snf.stanford.edu>

theres nothing wrong with svg coat # 1 .
user  reported  the wrong piece of equipment.
working ok .