From narya at snf.stanford.edu Mon Feb 4 08:59:53 2002 From: narya at snf.stanford.edu (narya at snf.stanford.edu) Date: Feb 4, 2002 8:59:53 PM Subject: Problem svgcoat 2002-02-04 20:59:52: Coater sensor not trigerring.. Message-ID: From mcconnel at snf.stanford.edu Mon Feb 4 10:54:11 2002 From: mcconnel at snf.stanford.edu (mcconnel at snf.stanford.edu) Date: Feb 4, 2002 10:54:11 PM Subject: Problem svgcoat 2002-02-04 22:54:10: wafer on the spinner chuck Message-ID: Somebody left a wafer (hopefully just a dummy) on the spinner chuck. I also tried running the system with a dummy wafer, and it cannot recognize the wafer after the spin has completed. From vilanova at snf.stanford.edu Tue Feb 5 07:00:17 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Feb 5, 2002 7:00:17 AM Subject: Problem svgcoat 2002-02-04 20:59:52: Coater sensor not trigerring.. Message-ID: Coater Sensor Working ok , tested it . Ready to use From vilanova at snf.stanford.edu Tue Feb 5 07:01:36 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Feb 5, 2002 7:01:36 AM Subject: Problem svgcoat 2002-02-04 22:54:10: wafer on the spinner chuck Message-ID: Sensor, Working ok, ready to use From jdas at snf.stanford.edu Tue Feb 5 10:41:15 2002 From: jdas at snf.stanford.edu (jdas at snf.stanford.edu) Date: Feb 5, 2002 10:41:15 AM Subject: Shutdown svgcoat 2002-02-05 10:41:13: Spinner sensor not working Message-ID: From vilanova at snf.stanford.edu Tue Feb 5 10:59:49 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Feb 5, 2002 10:59:49 AM Subject: Shutdown svgcoat 2002-02-05 10:41:13: Spinner sensor not working Message-ID: I ran 5 wafers and the Sensor works ok, I noticed that someone picked up the wafer before the end of the cycle, ok to use From jdas at snf.stanford.edu Tue Feb 5 12:14:51 2002 From: jdas at snf.stanford.edu (jdas at snf.stanford.edu) Date: Feb 5, 2002 12:14:51 PM Subject: Shutdown svgcoat 2002-02-05 12:14:51: spinner sensor not working Message-ID: From martinez at snf.stanford.edu Tue Feb 5 02:44:49 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Feb 5, 2002 2:44:49 PM Subject: Shutdown svgcoat 2002-02-05 12:14:51: spinner sensor not working Message-ID: reseated wafer sensor connector, aligned centering tabs cycled 25 wafers. From true at snf.stanford.edu Sun Feb 10 11:26:18 2002 From: true at snf.stanford.edu (true at snf.stanford.edu) Date: Feb 10, 2002 11:26:18 PM Subject: Shutdown svgcoat 2002-02-10 23:26:17: track1 drain alarm Message-ID: sender cassette not working From vilanova at snf.stanford.edu Mon Feb 11 07:12:57 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Feb 11, 2002 7:12:57 AM Subject: Shutdown svgcoat 2002-02-10 23:26:17: track1 drain alarm Message-ID: track 1 drained , tested , working ok ready to use From wliu at snf.stanford.edu Tue Feb 12 12:37:29 2002 From: wliu at snf.stanford.edu (wliu at snf.stanford.edu) Date: Feb 12, 2002 12:37:29 AM Subject: Problem svgcoat 2002-02-12 00:37:27: track 1 drain alarm sounded Message-ID: From vilanova at snf.stanford.edu Tue Feb 12 07:05:10 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Feb 12, 2002 7:05:10 AM Subject: Problem svgcoat 2002-02-12 00:37:27: track 1 drain alarm sounded Message-ID: track 1 container drained, ready to use From hphan at snf.stanford.edu Thu Feb 14 03:46:53 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Feb 14, 2002 3:46:53 PM Subject: Problem svgcoat 2002-02-14 15:46:50: Washer in program #8 is not good Message-ID: From hphan at snf.stanford.edu Thu Feb 14 03:48:00 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Feb 14, 2002 3:48:00 PM Subject: Problem svgcoat 2002-02-14 15:47:36: Spin Chuck is not go down smoothly Message-ID: From martinez at snf.stanford.edu Tue Feb 19 09:28:49 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Feb 19, 2002 9:28:49 AM Subject: Problem svgcoat 2002-02-14 15:47:36: Spin Chuck is not go down smoothly Message-ID: adj air pressure for spindle down function cycled wafers ready for use From martinez at snf.stanford.edu Tue Feb 19 09:34:16 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Feb 19, 2002 9:34:16 AM Subject: Problem svgcoat 2002-02-14 15:46:50: Washer in program #8 is not good Message-ID: cycled test wafers program 8. EBR looks good From vilanova at snf.stanford.edu Wed Feb 27 09:54:58 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Feb 27, 2002 9:54:58 AM Subject: Problem svgcoat 2002-02-27 09:54:56: Weekly Pm in progress Message-ID: From vilanova at snf.stanford.edu Wed Feb 27 10:50:48 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Feb 27, 2002 10:50:48 AM Subject: Problem svgcoat 2002-02-27 09:54:56: Weekly Pm in progress Message-ID: Cleaned and replaced catch cup, belts ,cleaned hotplates, Indexers, checked Resist bottles and canisters. working ok, Ready to use