From enwang at snf.stanford.edu Fri Mar 1 12:12:48 2002 From: enwang at snf.stanford.edu (enwang at snf.stanford.edu) Date: Mar 1, 2002 12:12:48 AM Subject: Problem svgcoat 2002-03-01 00:12:48: HMDS doesn't run Message-ID: From vilanova at snf.stanford.edu Fri Mar 1 07:49:58 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mar 1, 2002 7:49:58 AM Subject: Problem svgcoat 2002-03-01 00:12:48: HMDS doesn't run Message-ID: wafer piece found on one o fthe gaskets, removed wafer piece and cleaned gasket. ok to use From true at snf.stanford.edu Tue Mar 5 06:27:54 2002 From: true at snf.stanford.edu (true at snf.stanford.edu) Date: Mar 5, 2002 6:27:54 PM Subject: Problem svgcoat 2002-03-05 18:27:52: coating incomplete Message-ID: On my last 5 wafers, there is a large swath near the edge of the wafer where the resist did not spread/dispense From vilanova at snf.stanford.edu Wed Mar 6 07:56:50 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mar 6, 2002 7:56:50 AM Subject: Problem svgcoat 2002-03-05 18:27:52: coating incomplete Message-ID: replaced resist bottle, cycled wafers, working ok ready to use. From martinez at snf.stanford.edu Wed Mar 6 02:26:46 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mar 6, 2002 2:26:46 PM Subject: Comment svgcoat 2002-03-06 14:26:45: bad pump Message-ID: the resist recovery valve (suck back) on the 3612 resist pump is broken. part needs to be ordered. down time ~ 3 days SPR220-7 ok to use. From wliu at snf.stanford.edu Wed Mar 6 04:12:34 2002 From: wliu at snf.stanford.edu (wliu at snf.stanford.edu) Date: Mar 6, 2002 4:12:34 PM Subject: Problem svgcoat 2002-03-06 16:12:30: 3612 resist coverage awkward Message-ID: From vilanova at snf.stanford.edu Thu Mar 7 11:10:23 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mar 7, 2002 11:10:23 AM Subject: Problem svgcoat 2002-03-06 16:12:30: 3612 resist coverage awkward Message-ID: Suck back Valve replaced, Tested it , working ok Ready to use From beckwith at snf.stanford.edu Wed Mar 13 06:48:11 2002 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Mar 13, 2002 6:48:11 PM Subject: Problem svgcoat 2002-03-13 18:48:11: first 4 wafers looked fine, next 3 had comets on them Message-ID: used the YES oven, no svg prime, coat 2 (1.0 um), std bake. From martinez at snf.stanford.edu Thu Mar 14 07:59:11 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mar 14, 2002 7:59:11 AM Subject: Problem svgcoat 2002-03-13 18:48:11: first 4 wafers looked fine, next 3 had comets on them Message-ID: cleaned nozzle, purged resist line, cycled test wafers prog.#8 1.6u 3612 resist, program #2 bake. resist uniformity was excellent. sharleen, it is possible that your wafers have contamination on them from another source. please make sure your wafers are clean before bringing them into the litho area. From vilanova at snf.stanford.edu Thu Mar 21 07:57:26 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mar 21, 2002 7:57:26 AM Subject: Problem svgcoat 2002-03-21 07:57:25: Pm In progress Message-ID: From vilanova at snf.stanford.edu Thu Mar 21 09:20:30 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mar 21, 2002 9:20:30 AM Subject: Problem svgcoat 2002-03-21 07:57:25: Pm In progress Message-ID: PM Completed From cmfaulkn at snf.stanford.edu Sat Mar 23 08:11:14 2002 From: cmfaulkn at snf.stanford.edu (cmfaulkn at snf.stanford.edu) Date: Mar 23, 2002 8:11:14 PM Subject: Problem svgcoat 2002-03-23 20:11:13: send indexer not sensing casette Message-ID: From vilanova at snf.stanford.edu Mon Mar 25 07:40:57 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mar 25, 2002 7:40:57 AM Subject: Problem svgcoat 2002-03-23 20:11:13: send indexer not sensing casette Message-ID: when the Resist container under the coater is full the machine will not work and the alarm will sound, if we are of HMDS it will do the same thing it will not work and if the bottle of resist is Empty the machine will not work. I emptied resist container tested it working ok. From beckwith at snf.stanford.edu Tue Mar 26 05:43:10 2002 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Mar 26, 2002 5:43:10 PM Subject: Problem svgcoat 2002-03-26 17:43:10: program 8 Message-ID: sometimes forgets to do the edge bead removal. It appears there is enough EBR in the line????? From vilanova at snf.stanford.edu Wed Mar 27 08:37:19 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mar 27, 2002 8:37:19 AM Subject: Problem svgcoat 2002-03-26 17:43:10: program 8 Message-ID: Adjusted EBR Nozzle screws , Ran Several wafers under Programs #8 and #7 and EBR working ok. Ready to use. From vilanova at snf.stanford.edu Thu Mar 28 02:04:27 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mar 28, 2002 2:04:27 PM Subject: Shutdown svgcoat 2002-03-28 14:04:26: Pm in progress Message-ID: From vilanova at snf.stanford.edu Thu Mar 28 02:42:33 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mar 28, 2002 2:42:33 PM Subject: Shutdown svgcoat 2002-03-28 14:04:26: Pm in progress Message-ID: Preventive Maintenance Completed.