Problem svgcoat 2002-03-13 18:48:11: first 4 wafers looked fine, next 3 had comets on them

beckwith at snf.stanford.edu beckwith at snf.stanford.edu
Wed Mar 13 06:48:11 PST 2002


used the YES oven, no svg prime, coat 2 (1.0 um), std bake.




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