Problem svgcoat 2002-03-13 18:48:11: first 4 wafers looked fine, next 3 had comets on them

martinez at snf.stanford.edu martinez at snf.stanford.edu
Thu Mar 14 07:59:11 PST 2002


cleaned nozzle, purged resist line, cycled test wafers prog.#8
1.6u 3612 resist, program #2 bake. resist uniformity was
excellent. sharleen, it is possible that your wafers have 
contamination on them from another source. please make sure
your wafers are clean before bringing them into the litho area.




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