Problem svgcoat 2002-03-23 20:11:13: send indexer not sensing casette

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Mar 25 07:40:57 PST 2002


when the Resist container under the coater is full  the machine will not work and the alarm will sound, if we are of HMDS it will
do the same thing it will not work and if the bottle of resist is 
Empty  the machine will not work. I emptied resist container
tested it working ok.




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