Problem svgcoat 2002-05-15 00:06:24: wafer broke on coater chuck
wliu at snf.stanford.edu
wliu at snf.stanford.edu
Wed May 15 12:06:25 PDT 2002
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Problem svgcoat 2002-05-14 12:51:41: prime program does not work
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Problem svgcoat 2002-05-15 00:06:24: wafer broke on coater chuck
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fragments of the wafer are around
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Problem svgcoat 2002-05-14 12:51:41: prime program does not work
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Problem svgcoat 2002-05-15 00:06:24: wafer broke on coater chuck
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