Problem svgcoat 2002-05-15 00:06:24: wafer broke on coater chuck

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed May 15 08:02:21 PDT 2002


We have checked everything, we have run several wafers ( 30)
and the system is working fine, I couldnt repeat the problem.
Ok to use.




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