May 2002 Archives by thread

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Starting: Thu May 2 02:22:28 PDT 2002
Ending: Fri May 31 12:18:45 PDT 2002
Messages: 39

• Shutdown svgcoat 2002-05-02 14:22:26: weekly pm   martinez at snf.stanford.edu
  • Shutdown svgcoat 2002-05-02 14:22:26: weekly pm   vilanova at snf.stanford.edu
• Shutdown svgcoat 2002-05-03 17:40:17: Sensor change   uli at snf.stanford.edu
  • Shutdown svgcoat 2002-05-03 17:40:17: Sensor change   uli at snf.stanford.edu
• Shutdown svgcoat 2002-05-03 17:42:58: sensor change   mahnaz at snf.stanford.edu
• Shutdown svgcoat 2002-05-03 08:01:59: sensor replacement   martinez at snf.stanford.edu
  • Shutdown svgcoat 2002-05-03 08:01:59: sensor replacement   uli at snf.stanford.edu
• Shutdown svgcoat 2002-05-03 17:42:58: sensors changed   uli at snf.stanford.edu
• Shutdown svgcoat 2002-05-06 14:38:32: WPM   martinez at snf.stanford.edu
  • Shutdown svgcoat 2002-05-06 14:38:32: WPM   martinez at snf.stanford.edu
• Problem svgcoat 2002-05-06 19:07:03: sensors malfunctioning   true at snf.stanford.edu
  • Problem svgcoat 2002-05-06 19:07:03: sensors malfunctioning   martinez at snf.stanford.edu
• Problem svgcoat 2002-05-06 09:56:59: broken wafer on primer   yyao at snf.stanford.edu
  • Problem svgcoat 2002-05-06 09:56:59: broken wafer on primer   martinez at snf.stanford.edu
• Problem svgcoat 2002-05-11 15:56:31: vapor prime station doesn't work   hector at snf.stanford.edu
  • Problem svgcoat 2002-05-11 15:56:31: vapor prime station doesn't work   vilanova at snf.stanford.edu
• Problem svgcoat 2002-05-12 21:55:50: Vapor prime destroying wafers   hector at snf.stanford.edu
  • Problem svgcoat 2002-05-12 21:55:50: Vapor prime destroying wafers   vilanova at snf.stanford.edu
• Shutdown svgcoat 2002-05-13 07:44:46: Maintenance shutdown   vilanova at snf.stanford.edu
  • Shutdown svgcoat 2002-05-13 07:44:46: Maintenance shutdown   vilanova at snf.stanford.edu
• Comment svgcoat 2002-05-14 01:37:02: wafers not centered on prime station   gyama at snf.stanford.edu
• Problem svgcoat 2002-05-14 01:37:53: wafers not centered on prime station   gyama at snf.stanford.edu
  • Problem svgcoat 2002-05-14 01:37:53: wafers not centered on prime station   vilanova at snf.stanford.edu
• Shutdown svgcoat 2002-05-14 08:55:01: Weekly Pm   vilanova at snf.stanford.edu
  • Shutdown svgcoat 2002-05-14 08:55:01: Weekly Pm   vilanova at snf.stanford.edu
• Problem svgcoat 2002-05-14 12:51:41: prime program does not work   qwang at snf.stanford.edu
  • Problem svgcoat 2002-05-14 12:51:41: prime program does not work   vilanova at snf.stanford.edu
• Problem svgcoat 2002-05-15 00:06:24: wafer broke on coater chuck   wliu at snf.stanford.edu
  • Problem svgcoat 2002-05-15 00:06:24: wafer broke on coater chuck   vilanova at snf.stanford.edu
• Problem svgcoat 2002-05-22 17:24:21: prime oven sensor problematic   arnold at snf.stanford.edu
  • Problem svgcoat 2002-05-22 17:24:21: prime oven sensor problematic   vilanova at snf.stanford.edu
• Shutdown svgcoat 2002-05-29 09:49:56: pm in progress   vilanova at snf.stanford.edu
  • Shutdown svgcoat 2002-05-29 09:49:56: pm in progress   vilanova at snf.stanford.edu
• Problem svgcoat 2002-05-29 23:26:51: HMDS not working.   amol at snf.stanford.edu
  • Problem svgcoat 2002-05-29 23:26:51: HMDS not working.   martinez at snf.stanford.edu
• Shutdown svgcoat 2002-05-30 06:56:41: shutdown   martinez at snf.stanford.edu
  • Shutdown svgcoat 2002-05-30 06:56:41: shutdown   martinez at snf.stanford.edu
• Shutdown svgcoat 2002-05-31 12:18:45:   haniff at snf.stanford.edu
  • Shutdown svgcoat 2002-05-31 12:18:45:   vilanova at snf.stanford.edu

Last message date: Fri May 31 12:18:45 PDT 2002
Archived on: Fri Jan 11 13:12:05 PST 2013

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