From martinez at snf.stanford.edu Mon Nov 4 01:49:46 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Nov 4, 2002 1:49:46 PM Subject: Shutdown svgcoat 2002-11-04 13:49:45: wpm Message-ID: From martinez at snf.stanford.edu Mon Nov 4 02:21:13 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Nov 4, 2002 2:21:13 PM Subject: Shutdown svgcoat 2002-11-04 13:49:45: wpm Message-ID: weekly pm done From tzewee at snf.stanford.edu Tue Nov 5 12:30:04 2002 From: tzewee at snf.stanford.edu (tzewee at snf.stanford.edu) Date: Nov 5, 2002 12:30:04 PM Subject: Problem svgcoat 2002-11-05 12:30:04: SVG Track 1 HDMS surface suspect contamination Message-ID: SVG Track 1 HDMS primer suspected to have contamination on surface, leading to wafers being stuck to the surface. Please investigate. Thanks. Tze Wee From vilanova at snf.stanford.edu Tue Nov 5 01:30:01 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Nov 5, 2002 1:30:01 PM Subject: Problem svgcoat 2002-11-05 12:30:04: SVG Track 1 HDMS surface suspect contamination Message-ID: cleaned HMDS hotplate, tested , working ok. Please DO NOT run wafers upside down. Ok to use .- From martinez at snf.stanford.edu Mon Nov 11 01:24:02 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Nov 11, 2002 1:24:02 PM Subject: Shutdown svgcoat 2002-11-11 13:24:02: wpm Message-ID: From martinez at snf.stanford.edu Mon Nov 11 02:25:00 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Nov 11, 2002 2:25:00 PM Subject: Shutdown svgcoat 2002-11-11 13:24:02: wpm Message-ID: weekly pm done From mahnaz at snf.stanford.edu Tue Nov 12 03:38:30 2002 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Nov 12, 2002 3:38:30 PM Subject: Problem svgcoat 2002-11-12 15:38:30: extra drop in the beg. Message-ID: it drops an extra drop of resist in the beg. of #8 From beckwith at snf.stanford.edu Tue Nov 12 06:46:47 2002 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Nov 12, 2002 6:46:47 PM Subject: Problem svgcoat 2002-11-12 18:46:46: prog 8 edge bead too narrow Message-ID: From vilanova at snf.stanford.edu Wed Nov 13 08:14:36 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Nov 13, 2002 8:14:36 AM Subject: Problem svgcoat 2002-11-12 15:38:30: extra drop in the beg. Message-ID: Suck back and Edge bead Adjusted , tested . Working ok, ready to use From vilanova at snf.stanford.edu Wed Nov 13 08:14:58 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Nov 13, 2002 8:14:58 AM Subject: Problem svgcoat 2002-11-12 18:46:46: prog 8 edge bead too narrow Message-ID: Edge bead Adjusted , working ok , ready to use From martinez at snf.stanford.edu Thu Nov 21 09:26:05 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Nov 21, 2002 9:26:05 AM Subject: Shutdown svgcoat 2002-11-21 09:26:04: WPM Message-ID: From martinez at snf.stanford.edu Thu Nov 21 09:59:35 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Nov 21, 2002 9:59:35 AM Subject: Shutdown svgcoat 2002-11-21 09:26:04: WPM Message-ID: weekly pm done From jonmohn at snf.stanford.edu Fri Nov 22 01:37:52 2002 From: jonmohn at snf.stanford.edu (jonmohn at snf.stanford.edu) Date: Nov 22, 2002 1:37:52 PM Subject: Problem svgcoat 2002-11-22 13:37:51: resist streaking Message-ID: The resist is streaking on svgcoat From vilanova at snf.stanford.edu Mon Nov 25 07:47:46 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Nov 25, 2002 7:47:46 AM Subject: Problem svgcoat 2002-11-22 13:37:51: resist streaking Message-ID: adjusted suck back Valve, working ok , ready to use.