Problem svgcoat 2002-11-05 12:30:04: SVG Track 1 HDMS surface suspect contamination

tzewee at tzewee at
Tue Nov 5 12:30:04 PST 2002

SVG Track 1 HDMS primer  suspected to have contamination on surface, leading to wafers being stuck to the surface.
  Please investigate.
Tze Wee

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