Problem svgcoat 2002-11-05 12:30:04: SVG Track 1 HDMS surface suspect contamination

tzewee at snf.stanford.edu tzewee at snf.stanford.edu
Tue Nov 5 12:30:04 PST 2002


SVG Track 1 HDMS primer  suspected to have contamination on surface, leading to wafers being stuck to the surface.
  Please investigate.
  Thanks.
Tze Wee




More information about the svgcoat-pcs mailing list