Problem svgcoat 2002-11-05 12:30:04: SVG Track 1 HDMS surface suspect contamination

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Nov 5 01:30:01 PST 2002

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cleaned HMDS hotplate, tested , working ok.
Please DO NOT run wafers upside down.
Ok to use .-

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