From vilanova at snf.stanford.edu Tue Oct 1 10:13:09 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 1, 2002 10:13:09 AM Subject: Shutdown svgcoat 2002-10-01 10:13:09: Weekly Pm Message-ID: From mcconnel at snf.stanford.edu Mon Oct 7 10:39:58 2002 From: mcconnel at snf.stanford.edu (mcconnel at snf.stanford.edu) Date: Oct 7, 2002 10:39:58 PM Subject: Problem svgcoat 2002-10-07 22:39:55: out of 3612 resist Message-ID: From vilanova at snf.stanford.edu Tue Oct 8 07:46:08 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 8, 2002 7:46:08 AM Subject: Problem svgcoat 2002-10-07 22:39:55: out of 3612 resist Message-ID: 3612 Resist bottle replaced, Ok to use :-) From vilanova at snf.stanford.edu Tue Oct 8 07:46:38 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 8, 2002 7:46:38 AM Subject: Shutdown svgcoat 2002-10-01 10:13:09: Weekly Pm Message-ID: Replaced 3612 Bottle , ok to use From martinez at snf.stanford.edu Thu Oct 10 09:09:50 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 10, 2002 9:09:50 AM Subject: Shutdown svgcoat 2002-10-10 09:09:49: w pm Message-ID: From martinez at snf.stanford.edu Thu Oct 10 10:12:55 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 10, 2002 10:12:55 AM Subject: Shutdown svgcoat 2002-10-10 09:09:49: w pm Message-ID: dubya pm done From cmfaulkn at snf.stanford.edu Mon Oct 14 10:21:38 2002 From: cmfaulkn at snf.stanford.edu (cmfaulkn at snf.stanford.edu) Date: Oct 14, 2002 10:21:38 AM Subject: Problem svgcoat 2002-10-14 10:21:36: heater wires bent Message-ID: The hot plate wires that lower the wafer are bent and the wafer can not be lowered onto the hot plate. From vilanova at snf.stanford.edu Mon Oct 14 10:43:30 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 14, 2002 10:43:30 AM Subject: Problem svgcoat 2002-10-14 10:21:36: heater wires bent Message-ID: track rail found loose, Fixed it , ok to use From bwacker at snf.stanford.edu Tue Oct 15 08:19:33 2002 From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu) Date: Oct 15, 2002 8:19:33 PM Subject: Problem svgcoat 2002-10-15 20:19:32: stops and waits... Message-ID: just before resist spinner. I tried to use but it did not work. barbara From vilanova at snf.stanford.edu Wed Oct 16 07:40:19 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 16, 2002 7:40:19 AM Subject: Problem svgcoat 2002-10-15 20:19:32: stops and waits... Message-ID: found catchcup out of normal position. Catchcup reset it , tested , working ok ready to use . From martinez at snf.stanford.edu Wed Oct 16 09:12:40 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 16, 2002 9:12:40 AM Subject: Shutdown svgcoat 2002-10-16 09:12:38: wpm Message-ID: From vilanova at snf.stanford.edu Wed Oct 16 10:09:44 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 16, 2002 10:09:44 AM Subject: Shutdown svgcoat 2002-10-16 09:12:38: wpm Message-ID: WPM Completed From vilanova at snf.stanford.edu Thu Oct 24 07:34:18 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 24, 2002 7:34:18 AM Subject: Shutdown svgcoat 2002-10-24 07:34:16: weekly maintenance Message-ID: Weekly maintenance in progress From vilanova at snf.stanford.edu Thu Oct 24 08:24:52 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 24, 2002 8:24:52 AM Subject: Shutdown svgcoat 2002-10-24 08:24:52: wpm Message-ID: From vilanova at snf.stanford.edu Thu Oct 24 08:25:10 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 24, 2002 8:25:10 AM Subject: Shutdown svgcoat 2002-10-24 07:34:16: weekly maintenance Message-ID: Weekly Pm Completed From vilanova at snf.stanford.edu Thu Oct 24 08:25:31 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 24, 2002 8:25:31 AM Subject: Shutdown svgcoat 2002-10-24 08:24:52: wpm Message-ID: Weekly Pm Completed From martinez at snf.stanford.edu Tue Oct 29 09:13:50 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 29, 2002 9:13:50 AM Subject: Shutdown svgcoat 2002-10-29 09:13:50: weekly preventative maintenance Message-ID: From martinez at snf.stanford.edu Tue Oct 29 10:12:12 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 29, 2002 10:12:12 AM Subject: Shutdown svgcoat 2002-10-29 09:13:50: weekly preventative maintenance Message-ID: wpm done