From beckwith at snf.stanford.edu Thu Sep 5 01:23:55 2002 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Sep 5, 2002 1:23:55 PM Subject: Problem svgcoat 2002-09-05 13:23:54: disp2 not really dispensing Message-ID: It only dispenses 1-2 times per pushing the start button. From martinez at snf.stanford.edu Thu Sep 5 02:03:03 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 5, 2002 2:03:03 PM Subject: Problem svgcoat 2002-09-05 13:23:54: disp2 not really dispensing Message-ID: cycled test wafers. no problem found From beckwith at snf.stanford.edu Thu Sep 5 17:24:14 2002 From: beckwith at snf.stanford.edu (Sharleen Beckwith) Date: Thu, 5 Sep 2002 17:24:14 -0700 Subject: Problem svgcoat 2002-09-05 13:23:54: disp2 not really dispensing Message-ID: At 2:03 AM -0700 9/5/02, martinez at snf.stanford.edu wrote: >cycled test wafers. no problem found No, I meant the disp2 program, the one that is supposed to purge out the lines. It only does 1-2 purges, not the 20, or so, it is supposed to do. No wafers go through that one. Sharleen -- =-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-= Knowledge is the basis, for without knowing each other it is difficult to build trust and to reach a state of genuine unity, without which it is hard to get peace. His Holiness Tenzin Gyatso, The Fourteenth Dalai Lama =-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-=-= From martinez at snf.stanford.edu Fri Sep 6 09:16:32 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 6, 2002 9:16:32 AM Subject: Shutdown svgcoat 2002-09-06 09:16:31: wpm Message-ID: From martinez at snf.stanford.edu Fri Sep 6 10:10:55 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 6, 2002 10:10:55 AM Subject: Shutdown svgcoat 2002-09-06 09:16:31: wpm Message-ID: weekly pm done From amyers at snf.stanford.edu Wed Sep 11 12:46:53 2002 From: amyers at snf.stanford.edu (amyers at snf.stanford.edu) Date: Sep 11, 2002 12:46:53 PM Subject: Problem svgcoat 2002-09-11 12:46:52: svgcoat track one Message-ID: For both progams 7 and 8, if I make the arm 7 in step 5 I get an error. It works for both programs 7 and 8 if I make the arm 6 in step 5. It also looks like the edge bead removal is more than 2 mm when the arm is set to 6. According to the cheat sheet I should be able to make the arm 7 in step 5 to get a 5 mm edge bead removal From martinez at snf.stanford.edu Wed Sep 11 01:53:15 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 11, 2002 1:53:15 PM Subject: Problem svgcoat 2002-09-11 12:46:52: svgcoat track one Message-ID: adj arm prog#7 parameters, cycled wafers. ok now From martinez at snf.stanford.edu Thu Sep 12 09:56:55 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 12, 2002 9:56:55 AM Subject: Shutdown svgcoat 2002-09-12 09:56:54: wpm Message-ID: From martinez at snf.stanford.edu Thu Sep 12 10:13:28 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 12, 2002 10:13:28 AM Subject: Shutdown svgcoat 2002-09-12 10:13:26: wpm Message-ID: From martinez at snf.stanford.edu Thu Sep 12 10:45:22 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 12, 2002 10:45:22 AM Subject: Shutdown svgcoat 2002-09-12 10:13:26: wpm Message-ID: weekly pm done. ready for use From martinez at snf.stanford.edu Thu Sep 12 10:45:38 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 12, 2002 10:45:38 AM Subject: Shutdown svgcoat 2002-09-12 09:56:54: wpm Message-ID: weekly pm completed From evelyn at snf.stanford.edu Thu Sep 12 12:00:52 2002 From: evelyn at snf.stanford.edu (evelyn at snf.stanford.edu) Date: Sep 12, 2002 12:00:52 PM Subject: Problem svgcoat 2002-09-12 12:00:51: resist won't suck back up Message-ID: after the resist pours out a drop is left which drops on the wafer causing streaking From amyers at snf.stanford.edu Thu Sep 12 12:21:32 2002 From: amyers at snf.stanford.edu (amyers at snf.stanford.edu) Date: Sep 12, 2002 12:21:32 PM Subject: Problem svgcoat 2002-09-12 12:21:29: remaining resist after 5 mm ebr Message-ID: I noticed that some of the wafers had resist in the ebr region when I tried program 8 with 7 arm for the ebr step 5 From martinez at snf.stanford.edu Thu Sep 12 01:48:30 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 12, 2002 1:48:30 PM Subject: Problem svgcoat 2002-09-12 12:21:29: remaining resist after 5 mm ebr Message-ID: due to thick resist. From martinez at snf.stanford.edu Thu Sep 12 01:48:48 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 12, 2002 1:48:48 PM Subject: Problem svgcoat 2002-09-12 12:00:51: resist won't suck back up Message-ID: cycled wafers npf From martinez at snf.stanford.edu Tue Sep 17 01:08:48 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 17, 2002 1:08:48 PM Subject: Shutdown svgcoat 2002-09-17 13:08:48: wpm Message-ID: From hector at snf.stanford.edu Wed Sep 18 12:52:57 2002 From: hector at snf.stanford.edu (hector at snf.stanford.edu) Date: Sep 18, 2002 12:52:57 PM Subject: Shutdown svgcoat 2002-09-18 12:52:56: spin chuck doesn't engage Message-ID: From martinez at snf.stanford.edu Wed Sep 18 01:36:08 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 18, 2002 1:36:08 PM Subject: Shutdown svgcoat 2002-09-18 12:52:56: spin chuck doesn't engage Message-ID: cleaned contamination from spin chuck, cycled test wafers. From martinez at snf.stanford.edu Wed Sep 18 01:36:42 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 18, 2002 1:36:42 PM Subject: Shutdown svgcoat 2002-09-17 13:08:48: wpm Message-ID: wpm done From martinez at snf.stanford.edu Tue Sep 24 09:26:30 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 24, 2002 9:26:30 AM Subject: Shutdown svgcoat 2002-09-24 09:26:29: wpm Message-ID: From martinez at snf.stanford.edu Tue Sep 24 10:19:24 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Sep 24, 2002 10:19:24 AM Subject: Shutdown svgcoat 2002-09-24 09:26:29: wpm Message-ID: weekly pm completed. ready for use