Problem svgcoat 2002-09-05 13:23:54: disp2 not really dispensing

Sharleen Beckwith beckwith at snf.stanford.edu
Thu Sep 5 17:24:14 PDT 2002


At 2:03 AM -0700 9/5/02, martinez at snf.stanford.edu wrote:
>cycled test wafers. no problem found

No, I meant the disp2 program, the one that is supposed to purge out the lines.
It only does 1-2 purges, not the 20, or so, it is supposed to do. No wafers go
through that one.

Sharleen
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